Nesilicon Carbide Cantilevers Paddle
Chigadzirwa chakadzama uye kushandiswa
Yakakura chiuno kurodha simba silicon carbide SiSiC / SiC cantilever paddle / danda inokodzera robhoti otomatiki kurodha uye kubata system nekuti ine yakagadzika kuita, isiri-deformation mune yakakwira tembiricha uye hombe chiuno chekutakura simba. Sezvo chikamu checantilever paddle chakatsiga chisina deformation, zvinokwanisika kugadzira hukuru hukuru hweferfer uchishandisa aripo machubhu machubhu. Yakakura wafer kurodha simba silicon carbide SiSiC / SiC cantilever paddle / danda inogona kuiswa kune LPVCD pahwaro hwayo yakafanana yekupisa yekuwedzera coefficient neLPVCD coating, iyo inowedzera zvikuru nguva yekuchengetedza uye yekuchenesa kutenderera, uye zvakanyanya kudzora kusvibisa.
Unyanzvi parameter yekuita kwakasungwa nesilicon carbide RBSIC:
| chinhu | chikwata | data |
| Kupisa kwekushandisa | ℃ | 1380 |
| kuwanda | G / cm3 | > = 3.02 |
| Vhura porosity | % | <0.1 |
| Chiyero chaMoh chekuoma | 13 | |
| Kukotama simba | Mpa | 250 (20 ℃) |
| Mpa | 280 (1200 ℃) | |
| Modulus yekusimba | Gpa | 330 (20 ℃) |
| Gpa | 300 (1200 ℃) | |
| Thermal kuitisa | W / mk | 45 (1200 ℃) |
| Coefficient yekuwedzera kwekushisa | K-1 * 10-6 | 4.5 |
| Acid-chiratidzo alkaline | Zvakanaka |
Mamiriro:
a. Iyo haina kuremara pane yakanyanya tembiricha uye wefer kurodha simba yakakura;
b. Yakanaka kupisa kupisa uye hupenyu hwakareba hwebasa;
c. Iyo yekupisa yekuwedzera coefficient yeiyo cantilever paddle idiki zvakanyanya, iyo inowedzera nguva yakareba yekugadzirisa uye yekuchenesa kutenderera;
uye inoderedza zvakanyanya kusvibisa
Imwe fenicha yemoto inogadzirwa nesilicon carbide ceramic
Kunze kwe Reaction sintered silicon carbide SiSiC cantilever paddle yekutakura wafer, isu zvakare tinogadzira imwe fenicha fenicha inosanganisira RBSIC / SISIC silicon carbide matanda, mombhu machubhu, yekunonoka kamwene chubhu, swirl kamwene chubhu, oxide yakasungwa SIC silicon carbide mabheti / setter ndiro uye RBSIC inotonhora pombi .
Pfeka zvinopesana neRBSIC / SISIC silicon carbide zvigadzirwa
Nekuti yedu RBSIC / SISIC silicon carbide chigadzirwa chine zvakanakira chakanakisa kupfeka kuramba, ngura kuramba uye hupenyu hurefu hwehupenyu, inogona zvakare kugadzirwa kupfeka nemishonga linings iyo inogona kuiswa nyore nyore mukugadzirisa pombi kana madutu.
